2D
3D
Animate
Semiconductor Materials
[NRTF]/[MDT] // 1,3,3a,4,7,7a-hexahydro-1,3-dioxo-4,7-methano-2H-isoindol-2-yl ester
Product Info
- CAS No 133710-62-0
- Molecular Weight 311.24 g/mol
- Status Commercial
- Molecular Formula C10H8F3NO5S
Synonym(s)
- 5-Norbornene-2,3-dicarboximidyl
- Norbornenedicarboximidyl triflate
- 3a,4,7,7a-tetrahydro-2-(((trifluoromethyl)sulfonyl)oxy)-4,7-methano-1H-isoindole-1,3(2H)-dione
- 5-Norbornene-2,3-dicarboximidyl trifluoromethanesulfonate
Applications & Uses
- Photoacid Generator (PAG) to manufacture Photoresist Solutions.
- Suitable for KrF (krypton fluoride) Positive Photoresist production due to enhanced solubility in desired solvents.
- Functions as an acid-producing agent, facilitating reactions like chain breaking, deprotection, and cross-linking.
- Initiates cationic polymerization when exposed to KrF excimer laser.
- Controls Sensitivity, Resolution, Contrast, and Line-Edge Roughness during Acid Diffusion Reaction in KrF-positive photoresists.