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Semiconductor Materials

[NRTF]/[MDT] // 1,3,3a,4,7,7a-hexahydro-1,3-dioxo-4,7-methano-2H-isoindol-2-yl ester

Product Info

  • CAS No 133710-62-0
  • Molecular Weight 311.24 g/mol
  • Status Commercial
  • Molecular Formula C10H8F3NO5S

Synonym(s)

  • 5-Norbornene-2,3-dicarboximidyl
  • Norbornenedicarboximidyl triflate
  • 3a,4,7,7a-tetrahydro-2-(((trifluoromethyl)sulfonyl)oxy)-4,7-methano-1H-isoindole-1,3(2H)-dione
  • 5-Norbornene-2,3-dicarboximidyl trifluoromethanesulfonate

Applications & Uses

  1. Photoacid Generator (PAG) to manufacture Photoresist Solutions.
  2. Suitable for KrF (krypton fluoride) Positive Photoresist production due to enhanced solubility in desired solvents.
  3. Functions as an acid-producing agent, facilitating reactions like chain breaking, deprotection, and cross-linking.
  4. Initiates cationic polymerization when exposed to KrF excimer laser.
  5. Controls Sensitivity, Resolution, Contrast, and Line-Edge Roughness during Acid Diffusion Reaction in KrF-positive photoresists.

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